Limits to ion energy control in high density glow discharges: Measurement of absolute metastable ion concentrations
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چکیده
منابع مشابه
Limits to ion energy control in high density glow discharges: easurement of absolute metastable ion concentrations
Unprecedented demands for uniformity, throughput, anisotropy, and damage control in submicron pattern transfer are spurring development of new, low pressure, high charge density plasma reactors, Wafer biasing, independent of plasma production in these new systems is intended to provide improved ion flux and energy control so that selectivity can be optimized and damage can be minimized. However...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 1993
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.352391